Savitribai Phule Pune University, Pune

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Synthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist Gosavi, Suresh

By: Gosavi, Suresh [Researcher]Contributor(s): Gangal, S A [Guide]Material type: TextTextPublication details: Pune Savitribai Phule Pune University 1995Subject(s): Vlsi manufacturing technology||Resist synthesis||E-beam lithography||Pattern inspection||Ftir techniqueOnline resources: Click here to access online
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