Synthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist (Record no. 403933)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00702nam a2200145Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 220419s9999 xx 000 0 und d |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | Jayakar Knowledge Resource Center |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Gosavi, Suresh |
| Relator term | Researcher |
| 9 (RLIN) | 7893 |
| 245 #0 - TITLE STATEMENT | |
| Statement of responsibility, etc. | Gosavi, Suresh |
| Title | Synthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 1995 |
| Place of publication, distribution, etc. | Pune |
| Name of publisher, distributor, etc. | Savitribai Phule Pune University |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Vlsi manufacturing technology||Resist synthesis||E-beam lithography||Pattern inspection||Ftir technique |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gangal, S A |
| Relator term | Guide |
| 9 (RLIN) | 7868 |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1235">http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1235</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Thesis |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Jayakar Knowledge Resource Centre | Jayakar Knowledge Resource Centre | 19/04/2022 | 19/04/2022 | 19/04/2022 | Thesis |