Savitribai Phule Pune University, Pune

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Development and characterization of novel masking materials (polymers) for silicon micromachining Bodas, Dhananjay S

By: Bodas, Dhananjay S [Researcher]Contributor(s): Gangal, S A [Guide]Material type: TextTextPublication details: Pune Savitribai Phule Pune University 2004Subject(s): Micromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysisOnline resources: Click here to access online
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