Savitribai Phule Pune University, Pune

Jayakar Knowledge Resource Centre

Development and characterization of novel masking materials (polymers) for silicon micromachining (Record no. 403928)

MARC details
000 -LEADER
fixed length control field 00657nam a2200145Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 220419s9999 xx 000 0 und d
040 ## - CATALOGING SOURCE
Transcribing agency Jayakar Knowledge Resource Center
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Bodas, Dhananjay S
Relator term Researcher
9 (RLIN) 7884
245 #0 - TITLE STATEMENT
Statement of responsibility, etc. Bodas, Dhananjay S
Title Development and characterization of novel masking materials (polymers) for silicon micromachining
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Date of publication, distribution, etc. 2004
Place of publication, distribution, etc. Pune
Name of publisher, distributor, etc. Savitribai Phule Pune University
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Micromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysis
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Gangal, S A
Relator term Guide
9 (RLIN) 7868
856 ## - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1227">http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1227</a>
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Thesis
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Date last seen Price effective from Koha item type
        Jayakar Knowledge Resource Centre Jayakar Knowledge Resource Centre   19/04/2022   19/04/2022 19/04/2022 Thesis

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