| 000 | 00389nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 250508s9999 xx 000 0 und d | ||
| 022 | _a5596 | ||
| 024 | _qJOVSTBSS | ||
| 050 | _a01JOVSTBSS | ||
| 074 | _a1005596 | ||
| 245 | 0 | _aJnl. of Vacuum science & Technology B (Second series) | |
| 260 | _aNew yark | ||
| 260 | _bAmerican Institute of physics | ||
| 260 | _c1984 | ||
| 942 | _c2 | ||
| 999 |
_c564456 _d564456 |
||