| 000 | 00702nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 220419s9999 xx 000 0 und d | ||
| 040 | _cJayakar Knowledge Resource Center | ||
| 100 |
_aGosavi, Suresh _eResearcher _97893 |
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| 245 | 0 |
_cGosavi, Suresh _aSynthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist |
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| 260 |
_c1995 _aPune _bSavitribai Phule Pune University |
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| 653 | _aVlsi manufacturing technology||Resist synthesis||E-beam lithography||Pattern inspection||Ftir technique | ||
| 700 |
_aGangal, S A _eGuide _97868 |
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| 856 | _uhttp://lib.unipune.ac.in:8080/xmlui/handle/123456789/1235 | ||
| 942 | _c5 | ||
| 999 |
_c403933 _d403933 |
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