| 000 | 00657nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 220419s9999 xx 000 0 und d | ||
| 040 | _cJayakar Knowledge Resource Center | ||
| 100 |
_aBodas, Dhananjay S _eResearcher _97884 |
||
| 245 | 0 |
_cBodas, Dhananjay S _aDevelopment and characterization of novel masking materials (polymers) for silicon micromachining |
|
| 260 |
_c2004 _aPune _bSavitribai Phule Pune University |
||
| 653 | _aMicromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysis | ||
| 700 |
_aGangal, S A _eGuide _97868 |
||
| 856 | _uhttp://lib.unipune.ac.in:8080/xmlui/handle/123456789/1227 | ||
| 942 | _c5 | ||
| 999 |
_c403928 _d403928 |
||