000 00657nam a2200145Ia 4500
008 220419s9999 xx 000 0 und d
040 _cJayakar Knowledge Resource Center
100 _aBodas, Dhananjay S
_eResearcher
_97884
245 0 _cBodas, Dhananjay S
_aDevelopment and characterization of novel masking materials (polymers) for silicon micromachining
260 _c2004
_aPune
_bSavitribai Phule Pune University
653 _aMicromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysis
700 _aGangal, S A
_eGuide
_97868
856 _uhttp://lib.unipune.ac.in:8080/xmlui/handle/123456789/1227
942 _c5
999 _c403928
_d403928