000 00472nam a2200157Ia 4500
008 220101s9999 xx 000 0 und d
020 _a978-3-319-29744-6
040 _cJayakar Knowledge Resource Centre
100 _aCarbon nanotubes for interconnects
245 0 _aCarbon nanotubes for interconnects: process design and applications
250 _a1st
260 _bSpringer
_aSwitzerland
_c2017
300 _axii,333p p.
653 _aCarbon Nanotubes
942 _c1
999 _c324230
_d324230