| 000 | 00472nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 220101s9999 xx 000 0 und d | ||
| 020 | _a9780854044658 | ||
| 040 | _cJayakar Knowledge Resource Centre | ||
| 100 | _aChemical vapour deposition | ||
| 245 | 0 | _aChemical vapour deposition: precursors processes and applications | |
| 250 | _a1st | ||
| 260 |
_bRSC publishing _aCambridge _c2009 |
||
| 300 | _axv, 582p p. | ||
| 653 | _achemical vapour deposition | ||
| 942 | _c1 | ||
| 999 |
_c319989 _d319989 |
||