000 00496nam a2200157Ia 4500
008 211230s9999 xx 000 0 und d
020 _a0 471 95013 0
040 _cJayakar Knowledge Resource Centre
100 _aAnalysis Of Microelectronic Materials And Devices
245 0 _aAnalysis of microelectronic materials and devices
250 _a1st
260 _bJohn Wiley & Sons
_aChichester
_c1991
300 _axlvi,934p p.
653 _aMicroelectronics - Materials - Testing
942 _c1
999 _c262972
_d262972