| 000 | 00403nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 211228s9999 xx 000 0 und d | ||
| 020 | _a0 07 460064 8 | ||
| 040 | _cJayakar Knowledge Resource Centre | ||
| 100 | _aMicrolithography | ||
| 245 | 0 | _aMicrolithography | |
| 250 | _a1st | ||
| 260 |
_bTata McGraw-Hill _aNew Delhi _c1987 |
||
| 300 | _ax,387p p. | ||
| 653 | _aMicroelectronics | ||
| 942 | _c1 | ||
| 999 |
_c203732 _d203732 |
||