00340nam a2200133Ia 4500008004100000022000900041024001300050050001700063074001200080245005800092260001300150260003400163260000900197250508s9999    xx            000 0 und d  a5596  qJOVSTBSS  a01JOVSTBSS    a1005596 0aJnl. of Vacuum science & Technology B (Second series)  aNew yark  bAmerican Institute of physics  c1984