Jnl. of Vacuum science & Technology B (Second series) 

 - New yark  American Institute of physics  1984 
<br/><br/><label>ISSN: </label>5596 
<br/><br/><label>Standard No.: </label>
<br/><br/><label>LC Class. No.: </label>01JOVSTBSS   
<br/><br/><label>GPO Item No.: </label>1005596