TY  - BOOK
AU  - Gosavi, Suresh 
AU  - Gangal, S A 
TI  - Synthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist
PY  - 1995///
CY  - Pune
PB  - Savitribai Phule Pune University
KW  - Vlsi manufacturing technology||Resist synthesis||E-beam lithography||Pattern inspection||Ftir technique
UR  - http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1235
ER  -