Gosavi, Suresh  <br/><br/>
Synthesis characterization and lithographic evaluation of plasma polymerized α-methylstyrene and chlorinated α-methylstyrene as e-beam resist 
Gosavi, Suresh  
 - Pune  Savitribai Phule Pune University  1995 
<br/><br/><label>Subjects--Index Terms: </label>Vlsi manufacturing technology||Resist synthesis||E-beam lithography||Pattern inspection||Ftir technique