TY  - BOOK
AU  - Bodas, Dhananjay S 
AU  - Gangal, S A 
TI  - Development and characterization of novel masking materials (polymers) for silicon micromachining
PY  - 2004///
CY  - Pune
PB  - Savitribai Phule Pune University
KW  - Micromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysis
UR  - http://lib.unipune.ac.in:8080/xmlui/handle/123456789/1227
ER  -