Bodas, Dhananjay S  <br/><br/>
Development and characterization of novel masking materials (polymers) for silicon micromachining 
Bodas, Dhananjay S  
 - Pune  Savitribai Phule Pune University  2004 
<br/><br/><label>Subjects--Index Terms: </label>Micromachining||Fourier transform infrared spectroscopy||Pmma films||Re sputtering||Xps analysis