Ghodssi , Reza Ed. <br/><br/>
Mems materials and processes handbook 

 - 1st 
 - New York  Springer Science + Business media  2011 
 - [xxxv],1187p p. 
<br/><br/><label>ISBN: </label>978-0-387-47318-5 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems-Materials