00417nam a2200133Ia 4500008004100000020001800041040003800059100002400097245005100121250000800172260002900180300001500209653005900224220101s9999    xx            000 0 und d  a9781441960207  cJayakar Knowledge Resource Centre  aYounis, Mohammad I. 0aMEMS Linear and Nonlinear statics and dynamics  a1st  bSpringeraNew Yorkc2011  axv;453p p.  aMicroelectromechanical systems -- Mathematical models.