Younis, Mohammad I. <br/><br/>
MEMS Linear and Nonlinear statics and dynamics 

 - 1st 
 - New York  Springer  2011 
 - xv;453p p. 
<br/><br/><label>ISBN: </label>9781441960207 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems -- Mathematical models.