LIGA and its applications <br/><br/>
LIGA and its applications 

 - 1st 
 - Weinheim  Wiley-VCH Verlag GmbH & Co  2009 
 - x,479p. p. ; with plates 
<br/><br/><label>ISBN: </label>3-527-31698-4 
<br/><br/><label>Subjects--Index Terms: </label>Microelecthromechanical systems