00423nam a2200133Ia 4500008004100000020002200041040003800063100003900101245007200140250000800212260003200220300001600252653002100268220101s9999 xx 000 0 und d a978-3-319-29744-6 cJayakar Knowledge Resource Centre aCarbon nanotubes for interconnects 0aCarbon nanotubes for interconnects: process design and applications a1st bSpringeraSwitzerlandc2017 axii,333p p. aCarbon Nanotubes