Chemical vapour deposition <br/><br/>
Chemical vapour deposition: precursors processes and applications 

 - 1st 
 - Cambridge  RSC publishing  2009 
 - xv, 582p p. 
<br/><br/><label>ISBN: </label>9780854044658 
<br/><br/><label>Subjects--Index Terms: </label>chemical vapour deposition