Makhviladze, T M, Ed <br/><br/>
Lithography in microelectronics 

 - 1st 
 - New York  Nova Science Publishers  1989 
 - x,207p p. 
<br/><br/><label>ISBN: </label>0- 941743- 30- 6 
<br/><br/><label>Subjects--Index Terms: </label>Microelectronics