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LIGA and its applications

LIGA and its applications

LIGA and its applications - 1st - Weinheim Wiley-VCH Verlag GmbH & Co 2009 - x,479p. p. ; with plates

ISBN: 3-527-31698-4

Subjects--Index Terms: Microelecthromechanical systems

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Savitribai Phule Pune University, Pune

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LIGA and its applications